| MATTSON TECHNOLOGY GAINS MARKET SHARE WITH NEW BRIDGE TOOL
DRAM Leader Places Multimillion Dollar Order for New 200/300mm CVD System
FREMONT, Calif. — June 22, 1999 — Mattson Technology
(Nasdaq: MTSN) today announced that it has received an order
in excess of 10 million dollars for multiple Aspen III CVD
systems from a major DRAM manufacturer. The Aspen III CVD
system may be the industry’s first successful example
of a 200/300mm bridge tool that can use the same chamber
to process either 200mm or 300mm wafers.
During the past three years, Mattson Technology has been
working closely with key customers to ease the transition
from 200mm to 300mm wafer processing. Mattson Technology
has 300mm development work in progress with leading edge
semiconductor makers around the world, including a consortium
in Japan and I300I in North America. The company already
has Aspen III Strip and CVD equipment running in leading
edge semiconductor facilities around the world, including
Aspen Strip systems running production at SEMICONDUCTOR300,
the Infineon Technologies/Motorola 300mm production fab in
Europe. The company estimates it will have more than 20 Aspen
III systems installed by the end of 1999 with a majority
of the systems running 200mm processes. This gives Mattson
substantial lead-time to prove the production-worthiness
of its 300mm platform.
"This is a major achievement for a new product introduction
in a competitive market like CVD. When we designed the new
platform for 300mm processing, we knew we had to be prepared
for possible delays in the changeover," said Brad Mattson,
CEO of Mattson Technology. "By designing the Aspen III
CVD to use the same process chamber for both 200mm and 300mm
processing, we are able to prove the system’s capabilities
in production before the 300mm ramp hits," he added.
The Aspen III CVD system deposits silane-based films such
as oxide, oxynitride and nitride, as well as TEOS-based (tetraethylorthosilicate)
oxide films. Mattson offers a full suite of CVD applications:
ARC layers for excellent CD control; etch stop layers for
use with low k materials; passivation layers; IMD underlayers,
low temperature capping layers, low k FSG; and gate oxide
nitridation. Depending on the type of film deposited, the
Aspen III CVD has the capability to process up to 180 wafers
per hour -- higher throughput than the original Aspen II
platform, which set new industry standards when it was introduced
in 1991.
BRIDGING THE GAP BETWEEN 200MM & 300MM MANUFACTURING
The Aspen III CVD system is the first true CVD bridge system
in the industry. While other 300mm systems may require new
process chambers to convert to 200mm, the Aspen III CVD can
be converted to either 200mm or 300mm manufacturing with
only a few minor modifications to the cassette or FOUP stations.
The system is a fully automated plasma-enhanced chemical
vapor deposition (PECVD) system used for depositing silane-based
and TEOS films on either 200 mm or 300 mm wafers for a variety
of leading edge process applications. The flexible system
design addresses the needs of large volume manufacturing
where cost is a major consideration, such as DRAM, as well
as small volume production of ASIC and logic devices. Aspen
III CVD has the smallest footprint available in 200 and 300
mm PECVD tools and provides up to a 50% throughput advantage
for selected thin film applications. Customers are finding
the Aspen III CVD system cost effective to purchase for 200mm
applications because it has the additional capability to
move to 300mm manufacturing in the future.
About Mattson Technology
Mattson Technology Inc., is a leading supplier of thermal,
plasma and wet semiconductor processing equipment. The company's
products combine advanced process technology on a high productivity
platform, backed by industry-leading support. Since beginning
operations in 1989, the company's core vision has been to
help bring technology leadership and productivity gains to
semiconductor manufacturers worldwide. Headquartered in Fremont,
Calif., the company maintains sales and support centers throughout
the United States, Europe, Asia/Pacific and Japan. For more
information, please contact Mattson Technology Inc., 2800
Bayview Drive, Fremont, Calif. 94538. Telephone: (800) MATTSON.
Fax: (510) 657-0165. Internet:www.mattson.com
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