MATTSON TECHNOLOGY NAMES STUART RAFFERTY SENIOR DIRECTOR OF CUSTOMER SATISFACTION

Rafferty to Spearhead Customer Partnership Initiatives

FREMONT, Calif.- December 15, 2004 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced announced that Stuart Rafferty, 43, has been named senior director of Customer Satisfaction. In this newly created role, Rafferty will report to the chief operating officer and oversee Mattson’s global field services and customer support organizations. Rafferty will be responsible for developing an integrated, cross-business-unit approach to customer service and support implementation.

Previously, Rafferty held the position of director of Technical Support at Mattson. Rafferty joined Mattson Technology in 1994 and started the company’s United Kingdom support organization, which he managed until transferring to Mattson’s Fremont, California office in 1998. He was instrumental in leading multi-functional resource teams to deliver customer solutions for new product introduction acceptances, including for Mattson’s now production-proven Aspen III platform. Prior to joining Mattson, Rafferty held various engineering, service and support positions at Seagate Microelectronics (Scotland), Motorola (Scotland) and Tegal (UK).

“We created this new position to bring additional management focus to our field operations for disciplined execution of business processes in customer support,” said Robert B. MacKnight, chief operating officer for Mattson Technology. “Stuart’s extensive technical and international experience will be invaluable as we continue to strengthen our global support infrastructure to quickly meet our customers’ requirements.”

“Mattson is committed to helping our customers by driving a systemized, proactive approach to customer support,” said Rafferty, newly appointed Customer Satisfaction senior director. “I am pleased to have this opportunity to help strengthen Mattson Technology’s interface with and support of our growing portfolio of global customers.”

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in the fabrication of integrated circuits. The company’s dry strip and RTP equipment utilize innovative technology to deliver advanced processing capabilities on high-productivity platforms for the fabrication of current- and next-generation devices. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.