MATTSON TECHNOLOGY SHIPS FIRST FLASH-ASSISTED RTP SYSTEM TO BETA SITE PARTNER ATDF

Flash Anneal System Will be Used for Ultra-Shallow Junction Development through 45 nm and Below Technology Nodes

AUSTIN, Texas and FREMONT, Calif.- November 29, 2004 - ATDF and Mattson Technology, Inc. (NASDAQ: MTSN) today announced that Mattson has delivered the first flash assisted rapid thermal processing (RTP) system to its beta site partner ATDF in Austin, Texas. This new millisecond flash annealing system will be used to develop critical ultra-shallow junction (USJ) processes for the 45 nanometer (nm) technology node and beyond.

As design rules shrink below the 65 nm technology node and the industry moves to extremely short anneal times in advanced device manufacturing, precision thermal control becomes critical. USJ formation, a critical process in the fabrication of high performance CMOS devices, currently requires precise spike anneals that limit high-temperature exposure of the wafer to tenths of a second. In the emerging sub-65 nm era, advanced RTP applications will require this exposure time to be reduced to a few thousandths of a second. The system delivered to ATDF features a patented arc lamp and flash technology initially developed by Vortek Industries Ltd, which was recently acquired by Mattson Technology. This newest Mattson RTP system improves thermal control for millisecond flash-assisted RTP annealing and is expected to meet the advanced USJ anneal process requirements through the 22 nm regime.

“ATDF is a strategic technology and design center for development of advanced semiconductor processes and next-generation devices,” said Robert B. MacKnight, chief operating officer for Mattson Technology. “Having our latest flash-assisted RTP system at ATDF for advanced USJ development work should provide Mattson with an excellent basis for continued system refinement, while offering ATDF’s customers insights into the latest advances in 300 mm and deep submicron RTP technology. We are looking forward to a close working relationship with ATDF to support our commercialization of millisecond flash annealing RTP technology and help our customers address their most advanced process requirements through the 22 nm regime.”

ATDF will support Mattson to integrate this new technology into ATDF’s processes. Mattson’s initial work will be proprietary to its field of use. In a second phase, customers of Mattson and ATDF will be able to beta test the tool and technology in Austin.

“This integrated beta site testing will save Mattson Technology significant R&D investment and enable the company to fully use our 300 mm capability,” said Juergen Woehl, ATDF general manager. “ATDF’s superior cycle time will enable Mattson to learn the integration of its proprietary technology in record times.”

“In addition, this agreement is consistent with ATDF’s strategy of collaborative research with industry technology leaders,” Woehl added. “This collaboration will facilitate ATDF’s transition to full 300 mm processing capabilities and will create opportunities for external researchers to work with our supplier partner.”

ATDF’s Supplier programs offer semiconductor equipment makers the ability to test and qualify tools and technologies in a leading-edge environment on 300 mm wafers, without impacting production lines. Product-specific intellectual property developed at ATDF remains with the supplier.

About ATDF

ATDF is a leading technology R&D center where research meets manufacturing for semiconductor manufacturers, equipment and materials suppliers, and others. ATDF customers can confidentially test new designs, integration methodologies, and prototype systems while protecting their own intellectual property, and development partners can work closely with one another in a custom manufacturing environment. ATDF also develops baseline processes, accepted industry-wide, that bring new tools and materials to manufacturing faster, at lower cost. More information can be found at www.atdf.com.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in the fabrication of integrated circuits. The company’s dry strip and RTP equipment utilize innovative technology to deliver advanced processing capabilities on high-productivity platforms for the fabrication of current- and next-generation devices. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.