INDUSTRY-LEADING TAIWANESE FOUNDRIES PLACE ADDITIONAL PRODUCTION ORDERS FOR MATTSON TECHNOLOGY’S STRIP SYSTEMS

Aspen II Strip System of Choice to Support Volume Production

FREMONT, Calif.- March 10, 2004 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has received follow-on purchase orders for its Aspen II Strip systems from two of the world’s largest semiconductor foundries. The systems, some of which have already been shipped to the foundries’ manufacturing facilities in Taiwan, will be used for the volume production of DRAM and logic devices. These orders follow the foundries’ purchase last year of multiple Mattson 300 mm systems for their advanced 300 mm fabs.

“Our customers lead the semiconductor industry in foundry operations, and they continue to rely on our tools for not only their 300 mm production ramps but also for their 200 mm volume manufacturing needs,” said Dr. Bruno Doetsch, senior director and general manager of Asian operations of Mattson Technology. “The high-productivity Aspen II Strip system was selected by these industry-leading foundries as the system of choice for BEOL and FEOL photoresist processes because it meets their technical and economic requirements with its proven manufacturing reliability, process flexibility and cost-effectiveness.”

The Aspen Strip system features Mattson Technology’s proprietary inductively coupled plasma (ICP) source and effectively strips resist and residue, reducing the need for post-strip chemical processing. The Aspen Strip system offers advanced technology on a high-throughput platform, providing process performance and low cost of ownership advantages to chipmakers for advanced device manufacturing.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in the fabrication of integrated circuits. The company’s dry strip and RTP equipment utilize innovative technology to deliver advanced processing capabilities on high-productivity platforms for the fabrication of current- and next-generation devices. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.