SAMSUNG PURCHASES MATTSON TECHNOLOGY’S RTP & CVD SYSTEMS FOR MANUFACTURE OF NEXT-GENERATION DRAM CHIPS

Multiple 200 & 300 mm Systems Installed at Chipmaker’s Global Fabs

FREMONT, Calif.- February 4, 2004 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that Samsung Electronics Co. Ltd. has ordered additional Mattson RTP and CVD systems for volume production of leading-edge DRAM devices. The orders include multiple 200 mm 2900 and 300 mm 3000 RTP systems and 300 mm Aspen III CVD systems. The systems began shipment in late 2003 to several of the chipmaker’s manufacturing facilities in Korea and the U.S.

“Cost-competitive DRAM production requires high system productivity and low cost of ownership,” said Dr. Bruno Doetsch, senior director and general manager of Asian operations of Mattson Technology. “Samsung is one of the largest DRAM manufacturers in the world today, and the purchase of additional Mattson RTP and CVD systems demonstrates its confidence in our systems’ ability to deliver high throughput and meet very advanced technology requirements. We are delighted to continue supplying many of the critical production technologies our long-standing customer requires to manufacture its next-generation of DRAM products.”

Mattson Technology’s RTP portfolio includes the 2900 for 200 mm production and the 3000 series for 300 mm fabrication and advanced applications, including ultra-shallow junction and silicide formation. Key features of the 3000 systems include proprietary dual-sided wafer heating and temperature measurement technology that provides enhanced uniformity and yield.

The Aspen III CVD is a fully automated plasma-enhanced CVD deposition system that addresses the needs of large volume manufacturing where cost is a major consideration, such as DRAM, as well as small volume production of ASIC and logic devices. The Aspen III CVD is used for a variety of leading-edge process applications, including intermetal dielectric layer and anti-reflective coating layer processes.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in the fabrication of integrated circuits. The company’s dry strip and RTP equipment utilize innovative technology to deliver advanced processing capabilities on high-productivity platforms for the fabrication of current- and next-generation devices. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911.