MATTSON TECHNOLOGY RECEIVES ORDERS WORTH OVER $25 MILLION FROM NEW TAIWAN FAB

Suite of 300 mm RTP and Strip Systems Ordered for Advanced DRAMs

FREMONT, Calif. — August 26, 2003 — Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced it has received orders worth more than $25 million from a major new Taiwanese 300 mm DRAM manufacturer. These orders comprised a suite of advanced 300 mm strip and RTP processing equipment, including several Aspen III Strip and Mattson’s most advanced RTP systems. The systems, which are expected to begin shipment to the chipmaker’s new fab in the fourth quarter of 2003, will be used for both front-end-of-line (FEOL) and back-end-of-line (BEOL) DRAM production.

“This new DRAM manufacturer chose Mattson equipment for its fab ramp based on the high productivity performance of our systems and our ability to meet their aggressive goals for time to production,” said Bruno Doetsch, senior director of China, Taiwan and Southeast Asian operations of Mattson Technology. “Our advanced technologies, as well as our strong support infrastructure in Taiwan, were also key factors in our customer’s selection. We are very pleased to be part of our new customer’s fab expansion and look forward to providing the critical processing tools and services that will help contribute to its success.”

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.