Aspen III ICP Strip Systems Demonstrate Production Capability for Advanced Devices

FREMONT, Calif. — July 9, 2003 — Mattson Technology Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced a multi-million dollar order to supply multiple Aspen III ICP Strip systems to a major North American IC logic manufacturer. The 300 mm tools, the first of which shipped in May 2003, will be used for advanced low-k applications and other resist strip and residue removal processes in the back-end-of-line processing.

“ Our customer chose the Aspen III Strip based on its demonstrated ability to preserve the k value of its most advanced dielectric for 90 nm production,” said Douglas K. Walker, director of North American operations of Mattson Technology. “The latest 300 mm Aspen III ICP Strip tools will join a large installed base of Aspen II and Aspen III Strip systems already in production in this chipmaker’s facilities worldwide. We are extremely pleased that our customer continues to rely on Mattson Technology to supply dry strip solutions for the development and production of its advanced products and look forward to continuing to help it meet its 300 mm fab requirements.”

About the Aspen ICP Strip

The Aspen ICP Strip system features Mattson Technology’s proprietary inductively coupled plasma (ICP) source for low-damage processing. The system effectively strips resist and residue, reducing the need for post-strip chemical processing. The Aspen ICP Strip system offers advanced technology on a high-throughput platform, providing process performance and low cost of ownership advantages to chipmakers for advanced device manufacturing.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.