Mattson
Technology Receives Multimillion Dollar Order for Multiple
Strip Systems from Major US Chipmaker
FREMONT, Calif.- November 6, 2002 - Mattson Technology, Inc.
(NASDAQ: MTSN), a leading supplier of advanced process
equipment used to manufacture semiconductors, today announced
that it has received a multimillion dollar order for multiple
Aspen photoresist strip systems from a leading North American
integrated chip (IC) manufacturer. The Aspen ICP Strip
tools, which are scheduled to begin shipping in the fourth
quarter of 2002, will be used for bulk resist strip and
high-dose implant strip (HDIS) applications in the chipmaker's
flash memory and logic fabs.
"We have established an extensive installed base at
this long-time customer, one of the industry's leading flash
memory manufacturers," said Randy Matsuda, vice president
and general manager of the Films and Etch product group at
Mattson Technology. "We are pleased to continue the
strong relationship with this chipmaker by providing strip
solutions with the throughput, flexibility and performance
advantages necessary to meet the productivity requirements
of advanced IC manufacturing. This order represents our customer's
continued reliance on Mattson Technology for proven, high-productivity
strip solutions and further reinforces our leadership position
in the dry strip market."
The dual-chamber Aspen ICP Strip system, which provides
complete dry resist and residue removal capability, was selected
for its superior performance, proven reliability and high
productivity.
About the Aspen ICP Strip
The Aspen ICP Strip system features Mattson Technology's
proprietary inductively coupled plasma (ICP) source for advanced
sub-micron applications that require ultra-low contamination
levels. The system combines ultra-low damage and contamination
drive-in with high throughput and effectively strips resist
and residue, reducing the need for post-strip chemical processing.
The Aspen ICP Strip system offers the most advanced technology
on a high productivity platform, providing chipmakers the
process performance they require for advanced device manufacturing
at the low cost of ownership they need to compete in today's
market.
About Mattson Technology, Inc.
Mattson Technology,
Inc. is a leading supplier of semiconductor wafer processing
equipment used in "front-end" fabrication
of integrated circuits. The company is a market leader in
dry strip and RTP equipment, and its products combine advanced
process technology on high-productivity platforms backed
by industry-leading support. Since beginning operations in
1989, the company’s core vision has been to help bring
technology leadership and productivity gains to semiconductor
manufacturers worldwide. Headquartered in Fremont, Calif.,
the company maintains sales and support centers throughout
the United States, Europe and Asia. For more information,
please contact Mattson Technology, Inc., 47131 Bayside Parkway,
Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900.
Fax: (510) 492-5911. Internet: www.mattson.com.
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