FREMONT, Calif.- October 15, 2002 - Mattson Technology, Inc. (NASDAQ: MTSN), ), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that the company will be hosting a conference call on Thursday, November 7, 2002, beginning at 5:00 p.m. Eastern time (2:00 p.m. Pacific time). The conference call will cover the third quarter 2002 results and current business conditions.

The company's conference call will be simultaneously available to all interested listeners via an audio webcast on the Internet. For access, visit Mattson's website: www.mattson.com under the "Investor Line" section. A replay of the conference call will be available on Mattson's website for one week following the live broadcast.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.