MATTSON TECHNOLOGY ANNOUNCES PUBLIC AVAILABILITY OF FOURTH QUARTER AND YEAR END EARNINGS CONFERENCE CALL

FREMONT, Calif. - January 25, 2002 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today that it will host a conference call on Monday, February 25, 2002, beginning at 5:00 p.m. eastern time (2:00 p.m. pacific time). The conference call will cover the fourth quarter and 2001 year-end financial results and the company’s current business conditions.

The conference call will be available to interested listeners via an audio webcast that can be accessed through Mattson's home page at www.mattson.com under the "Investor Line" section. A replay of the call will also be available on Mattson’s website for one week following the live broadcast.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.