U.S. SEMICONDUCTOR MANUFACTUER OF INTEGRATED COMMUNICATION DEVICES RECIEVES SHIPMENT OF NEW ADVANCE LOW-K RESIST & RESIDUE REMOVAL SYSTEM

Sale of Mattson's Aspen III Highlands Confirms Mattson's Advantage Over Comparable Capable Equipment

FREMONT, Calif. - December 6, 2001 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced it has begun installing its next generation Low-K resist and residue removal equipment at a U.S semiconductor facility.

Highlands, 200mm/300mm capable product was selected for (BEOL) integration of resist and residue removal of porous and non-porous low K films of 0.1um and below dual damascene structures. Selection was based on advance process capability coupled with high productivity platform. Development capabilities will eventually be transferred to other alliance partners, which may also include foundries.

Michael Santiago, Plasma Division Product Marketing Manager, commented that this installation is significant because this customer is one of the leading-edge companies, which is aggressively integrating Low-K films. This installation demonstrates their confidence in our new product to meet their aggressive program goals. We look forward to strengthening our relationship with them.

bout Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.