MATTSON TECHNOLOGY ANNOUNCES PUBLIC AVAILABILITY OF THIRD QUARTER 2001 CONFERENCE CALL

FREMONT, Calif. - October 15, 2001 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it would release its third quarter financial results on November 13, 2001, after the close of the U.S. stock markets. The company will hold a conference call that day to discuss their results and current business conditions at 5:30 p.m. eastern time (2:30 p.m. pacific time). A live webcast of the conference call and a replay of the call will be available to interested persons via Mattson's website, www.mattson.com under the "Investor Line" section.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.