MATTSON TECHNOLOGY APPOINTS NEW EXECUTIVE VICE PRESIDENT

Robert MacKnight Fills Newly Created Position

FREMONT, Calif. - SEPTEMBER 17, 2001 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced the appointment of Robert MacKnight, 52, to the newly created position of executive vice president of corporate development. In his position as Executive Vice President, MacKnight will be chartered with strengthening Mattson Technology's market leadership position in its multiple product lines and will report directly to Mattson CEO Brad Mattson. Concurrently, MacKnight will be responsible for overseeing the operations and completing the integration of all RTP activities as General Manager of the RTP Product Business Unit, reporting to Walt Kasianchuk, president of the Thermal Division.

Mattson commented that MacKnight's strong operations and corporate development experience makes him ideally suited to handle two strategic roles within the company. "Bob's proven record in driving triple-digit company growth in his previous positions will be invaluable in helping prepare this company to realize its growth potential in the next industry upturn," noted Mattson. "I continue to be a proponent of amassing one of our industry's most valuable resources - management talent."

Mattson added that MacKnight's extensive experience in developing and growing global organizations will help in assuring that the company's Thermal Division remains on track operationally. "Our goal is to take a leadership role ensuring all of our business programs simultaneously and efficiently meet varying industry conditions and customer-specific needs," concluded Mattson.

MacKnight joins Mattson Technology from Microbar, Inc. (Sunnyvale, Calif.) where he was most recently president and chief operating officer. While at Microbar, MacKnight directed the company's return to profitability and its 300 percent revenue growth in 2000. Prior to Microbar, MacKnight was vice president and general manager of After Market Operations for Cymer, Inc. (San Diego, Calif.). At Cymer, MacKnight developed the global infrastructure that was instrumental in helping Cymer's revenue grow from $18 million to $200 million. He also held senior management positions with Watkins-Johnson Semiconductor Equipment Group. MacKnight holds bachelor and master's degrees from the University of Massachusetts.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.