| MATTSON TECHNOLOGY
INSTALLS $30 MILLION WORTH OF 300 MM EQUIPMENT AT PROMOS
TECHNOLOGIES INC.
Fab's Installation Reflects Confidence in Mattson's 300
mm Expertise Across All Three Divisions
FREMONT, Calif. - September 17, 2001 - Mattson Technology
(NASDAQ: MTSN), a leading supplier of advanced process equipment
used to manufacture semiconductors, today announced it has
begun installing $30 million worth of 300 mm equipment at
ProMOS Technologies Inc. This installation spans all three
of the company's divisions - Wet, Thermal and Plasma - and
includes several AWP300 wet processing equipment, as well
as multiple Aspen Strip and 3000 RTP systems.
ProMOS has been a Mattson customer for more than four years,
most recently purchasing other AWP and OMNI units for its
high-volume DRAM production. ProMOS will use the AWP products
for cleaning and etch; the RTP products will be used for
silicide formation, metallization and multiple layer annealing;
and the Aspen Strip products will be used in clean and photoresist
strip processing.
Brad Mattson, Mattson Technology CEO, commented that this
installation is significant because ProMOS is one of the
leading-edge companies that is aggressively ramping up 300
mm processing technology. "This installation demonstrates
ProMOS' confidence in our full range of 300 mm technology
to meet the company's aggressive 300 mm program goals. We
look forward to continuing our relationship with ProMOS," said
Mattson.
ProMOS is a joint venture between Mosel-Vitelic Corp. and
Siemens Semiconductor Group. The fab is located at Hsin-Chu
Science-Based Industrial Park in Taiwan, site of the majority
of the country's semiconductor manufacturing facilities.
About Mattson
Technology, Inc.
Mattson Technology,
Inc. is a leading supplier of semiconductor wafer processing
equipment used in "front-end" fabrication
of integrated circuits. The company is a market leader in
dry strip and RTP equipment, and its products combine advanced
process technology on high-productivity platforms backed
by industry-leading support. Since beginning operations in
1989, the company’s core vision has been to help bring
technology leadership and productivity gains to semiconductor
manufacturers worldwide. Headquartered in Fremont, Calif.,
the company maintains sales and support centers throughout
the United States, Europe and Asia. For more information,
please contact Mattson Technology, Inc., 47131 Bayside Parkway,
Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900.
Fax: (510) 492-5911. Internet: www.mattson.com.
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