MATTSON TECHNOLOGY TO SHIP FIVE 300MM ASPEN III STRIP SYSTEMS TO MAJOR JAPANESE FAB

300 mm Joint Venture Looks to Mattson for Processing Expertise

FREMONT, Calif. — October 26, 2000 — Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced it will ship five Aspen III Strip systems to a major Japanese chipmaker's recently announced 300 mm joint venture. Initial plans for the new 300 mm joint venture fab are to reach full production in the second half of 2001 at a capacity of 7,000 wafers per month. This fast ramp represented a major challenge for the customer that Mattson Technology was able to quickly address. Mattson will provide the systems and support by furnishing the leading-edge 300 mm wafer manufacturing technology the customer requires to meet its manufacturing objectives.

Brad Mattson, Mattson Technology CEO, stated that, "This order is indicative of our ongoing commitment to remain the market leader in the dry strip market. We will continue to offer the advanced technological solutions and industry-leading productivity in the 300 mm platform that helped us capture market leadership at the 200 mm node. I believe our technology and market leadership were significant factors in winning this order." Mattson added, "We are very excited to be providing 300 mm strip technology to this Japanese customer. We have more than 30 Aspen III systems on production lines around the world, and the rapid acceptance of the systems indicates that the Aspen III platform has attained a level of system maturity that is instilling confidence among the industry's leading-edge chipmakers."

About Mattson Technology

Mattson Technology Inc., is a leading supplier of thermal, plasma and wet semiconductor processing equipment. The company's products combine advanced process technology on a high productivity platform, backed by industry-leading support. Since beginning operations in 1989, the company's core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe, Asia/Pacific and Japan. For more information, please contact Mattson Technology Inc., 2800 Bayview Drive, Fremont, Calif. 94538. Telephone: (800) MATTSON. Fax: (510) 657-0165. Internet:www.mattson.com