| SupremaTM Maintenance Overview – Level 1 and 2
Free with 2-Training Credits per student.
This course is an introductory course for new users; this is a 10-day course over a two-week period.
The course covers the following:
- Course introduction
- Equipment safety and evacuation procedure
- Platform overview and component location
- GUI screen navigation and definitions
- Platform preventive maintenance schedule review and discussion
- Performance of the Platform PM’s that are needed most often
- Process Module functional description
- Process Module preventive maintenance schedule review and discussion
- Performance of the Process Module PM’s that are needed most often
- maXus Tool auto operations
- X-track leveling and teaching
- Atmospheric Robot leveling and teaching
- Cassette or FOUP leveling
- Complete Vacuum Robot teaching of all hand-off stations
- Auto run and wafer handling verification
Prerequisite: None
Length: 10-days
SupremaTM Advanced Maintenance Level 4 In Development
Not a free class.
This course is for the advanced user; it is required to attend the Level 1 and 2 Maintenance Overview course to qualify for this training.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
Prerequisite: Level 1, 2
Length: 5-days
Aspen III Maintenance Overview – Level 1
Free with 1-Training Credit per student.
This course is an introductory course for new users; this is the first week of a normal two-week course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation procedure
- Platform overview, component location
- GUI screen navigation and definitions
- Platform preventive maintenance schedule review and discussion
- Performance of the Platform PM’s that are needed most often
- Process Module functional description
- Process Module preventive maintenance schedule review and discussion
- Performance of the Process Module PM’s that are needed most often
- Aspen III Tool auto operations
Prerequisite: None
Length: 5-days
Aspen III Robot Teaching – Level 2
Free with 1-Training Credit per student.
This course is for the more experienced user; this is the second week of a normal two-week course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation procedure
- X-track leveling and teaching
- Procomm set-up and use
- Atmospheric Robot leveling
- PeWin set-up and use
- Complete Atmospheric Robot teaching of all hand-off stations
- Wafer Mapping set-up and test
- Cassette or FOUP leveling
- Vacuum Robot leveling
- Complete Vacuum Robot teaching of all hand-off stations
- Auto run and wafer handling verification
Prerequisite: Aspen III - Level 1
Length: 5-days
Aspen III Module classes – Level 3
Not a free class.
This course is for the experienced user; this course is not covered by warranty or training credits. It is required to take the Level 1, and Level 2 Aspen III courses to attend this class. For ICPht, CVD, Strip, Highlands, eHighlands Modules.
The course covers the following:
- Course introduction
- Equipment safety and evacuation procedure
- Process theory of operation
- Review of interconnect diagrams and signal flow
- Component Removal and Replacement
- Major PM procedure hands-on
Prerequisite: Aspen III – Level 1 and Level 2
Length: 3-days
Aspen III Advanced Wafer Handling – Level 3
Not a free class.
This course is for the experienced user; this course is not covered by warranty or training credits. It is required to take the Level 1 and Level 2 Aspen III courses to attend this class.
The course covers the following:
- Course introduction
- Equipment safety and Evacuation procedure
- Platform preventive maintenance review and discussion
- Performance of major Platform PM’s
- Remove and Replace Robot components not covered by PM
- Re-teaching of the wafer handling system
- Review of the Robot Troubleshooting Guide
- Auto Run and wafer handling verification
Prerequisite: Aspen III – Level 1 and Level 2
Length: 5-days
Aspen III Advanced Maintenance – Level 4
Not a free class.
This course is for the experienced user; this course is not covered by warranty or training credits. It is required to take the Level 1, Level 2, and Level 3 Aspen III courses to attend this class.
The course covers the following:
- Course introduction
- Equipment safety and Evacuation procedure
- Analog board adjustments
- I/O review and hands-on use
- Advanced PMAC diagnostics troubleshooting
- Robot Mapping
- Robot signal measurement
- Strip process fundamentals
- Strip recipe fundamentals
- Review of process troubleshooting
- RF matchbox and generator set-up
- Platform maintenance review
- Tech Support Bulletins, Best Known Methods and Fault analysis
Prerequisite: Aspen III - Level 1, Level 2, and Level 3
Length: 5-days
Aspen II Core Strip Overview & Maintenance – Level 1
On-site only, call for scheduling.
This course is an introductory course for new users; this is the first week of a normal two-week course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation procedure
- Core system overview
- System operations
- Component location
- User interface overview and operation
- General equipment theory
- Maintenance hands-on
- Robot theory, operation, wafer transfer functionality and alignments hands-on
- QNX software commands
Prerequisite: None
Length: 5-days
Aspen II Strip Module Overview & Maintenance – Level 2
On-site only, call for scheduling.
This course is for the more experienced user; this is the second week of a normal two-week course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation procedure
- Strip process theory overview
- Process module hardware review
- Preventive Maintenance procedure hands-on
- Generator control and adjustments hands-on
- Heater control and operation
Prerequisite: Aspen II - Level 1
Length: 5-days
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